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998:
Nb planar target

GRADE

Nb1

Nb2

NbZr1

element

Zr

0.02

0.02

0.8~1.2

Ti

0.002

0.005

0.02

C

0.01

0.02

0.01

N

0.015

0.05

0.01

O

0.015

0.025

0.015

H

0.001

0.005

0.0015

Ta

0.10

0.25

0.10

Fe

0.005

0.03

0.005

Si

0.005

0.02

0.005

W

0.03

0.05

0.03

Ni

0.005

0.01

0.005

Mo

0.010

0.05

0.01

Cr

0.002

0.01

0.002

Hf

-

-

-






























W and Lmm

Tmm

Surface

FLATNESS

50~400*200-1000MM

3~50

32Rms

0.15%


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